2024-03-29T12:13:16Z
https://u-ryukyu.repo.nii.ac.jp/oai
oai:u-ryukyu.repo.nii.ac.jp:02003834
2022-10-31T01:45:11Z
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水素ガス反応性RFマグネトロンスパッタリング法によるダイヤモンド状炭素薄膜の作製と評価
Synthesis of Diamond Like Carbon Film by Hydrogen Gas Reactive RF Magnetron Sputtering, and its Properties
渡久地, 實
新垣, 修
山下, 崇
Toguchi, Minoru
Arakaki, Osamu
Yamashita, Takashi
open access
Diamond-like-carbon film
Amorphous carbon film
Diamond film
Passivation film
Reactive rf-magnetron sputtering
Gaseous phase deposition
Diamond like carbon (DLC) films prepared by hydrogen gas reactive rf magnetron sputter deposition from a graphite target onto low temperature substrate (room temperature~160°C) have been examined using techniques of electric resistivity measurement and transmission electron microscopy. Electric resistivities of these films were the order of 10^10~10^13$\Omega$・cm, which increased with increasing hydrogen gas pressure. Electron diffraction patterns of these films indicated predominantly amorphous structure. Although 8 rings pattern in the electron diffraction observed by the selected area, the observed interplanar spacings coincided with the data by ASTM card for diamond (6-0675), and the number of these area increased with decreasing the gas pressure. Oblique-texture electron diffraction patterns were observed in the films which were prepared at the higher gas pressure (0.6~1.0Torr).
紀要論文
琉球大学工学部
1988-09
jpn
departmental bulletin paper
VoR
http://hdl.handle.net/20.500.12000/5547
http://hdl.handle.net/20.500.12000/5547
https://u-ryukyu.repo.nii.ac.jp/records/2003834
0389-102X
AN0025048X
琉球大学工学部紀要
36
63
75
https://u-ryukyu.repo.nii.ac.jp/record/2003834/files/No36p63.pdf