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  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 36号
  1. 部局別インデックス
  2. 工学部

水素ガス反応性RFマグネトロンスパッタリング法によるダイヤモンド状炭素薄膜の作製と評価

http://hdl.handle.net/20.500.12000/5547
http://hdl.handle.net/20.500.12000/5547
4870fe5a-1945-4210-bea3-72bae892d883
名前 / ファイル ライセンス アクション
No36p63.pdf No36p63.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2008-04-02
タイトル
タイトル 水素ガス反応性RFマグネトロンスパッタリング法によるダイヤモンド状炭素薄膜の作製と評価
言語 ja
タイトル
タイトル Synthesis of Diamond Like Carbon Film by Hydrogen Gas Reactive RF Magnetron Sputtering, and its Properties
言語 en
作成者 渡久地, 實

× 渡久地, 實

ja 渡久地, 實

Search repository
新垣, 修

× 新垣, 修

ja 新垣, 修

Search repository
山下, 崇

× 山下, 崇

ja 山下, 崇

Search repository
Toguchi, Minoru

× Toguchi, Minoru

en Toguchi, Minoru

Search repository
Arakaki, Osamu

× Arakaki, Osamu

en Arakaki, Osamu

Search repository
Yamashita, Takashi

× Yamashita, Takashi

en Yamashita, Takashi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 Diamond-like-carbon film
主題
言語 en
主題Scheme Other
主題 Amorphous carbon film
主題
言語 en
主題Scheme Other
主題 Diamond film
主題
言語 en
主題Scheme Other
主題 Passivation film
主題
言語 en
主題Scheme Other
主題 Reactive rf-magnetron sputtering
主題
言語 en
主題Scheme Other
主題 Gaseous phase deposition
内容記述
内容記述タイプ Other
内容記述 Diamond like carbon (DLC) films prepared by hydrogen gas reactive rf magnetron sputter deposition from a graphite target onto low temperature substrate (room temperature~160°C) have been examined using techniques of electric resistivity measurement and transmission electron microscopy. Electric resistivities of these films were the order of 10^10~10^13$\Omega$・cm, which increased with increasing hydrogen gas pressure. Electron diffraction patterns of these films indicated predominantly amorphous structure. Although 8 rings pattern in the electron diffraction observed by the selected area, the observed interplanar spacings coincided with the data by ASTM card for diamond (6-0675), and the number of these area increased with decreasing the gas pressure. Oblique-texture electron diffraction patterns were observed in the films which were prepared at the higher gas pressure (0.6~1.0Torr).
内容記述
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/5547
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 36, p. 63-75, 発行日 1988-09
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