{"created":"2022-01-27T08:06:09.363284+00:00","id":2004468,"links":{},"metadata":{"_buckets":{"deposit":"341fe446-a456-4773-be0a-37e54e5aa1bc"},"_deposit":{"id":"2004468","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"2004468"},"status":"published"},"_oai":{"id":"oai:u-ryukyu.repo.nii.ac.jp:02004468","sets":["1642838403123","1642838403551:1642838406845"]},"author_link":[],"item_1617186331708":{"attribute_name":"Title","attribute_value_mlt":[{"subitem_1551255647225":"マイクロ波を用いた大気圧非平衡プラズマの生成およびプロセスへの応用","subitem_1551255648112":"ja"},{"subitem_1551255647225":"Production of atmospheric pressure non-equilibrium plasma with microwave and applications for plasma processing","subitem_1551255648112":"en"}]},"item_1617186419668":{"attribute_name":"Creator","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"米須, 章","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"Yonesu, Akira","creatorNameLang":"en"}]}]},"item_1617186476635":{"attribute_name":"Access Rights","attribute_value_mlt":[{"subitem_1522299639480":"open access","subitem_1600958577026":"http://purl.org/coar/access_right/c_abf2"}]},"item_1617186609386":{"attribute_name":"Subject","attribute_value_mlt":[{"subitem_1522299896455":"ja","subitem_1522300014469":"Other","subitem_1523261968819":"マイクロ波プラズマ"},{"subitem_1522299896455":"ja","subitem_1522300014469":"Other","subitem_1523261968819":"大気圧非平衡プラズマ"},{"subitem_1522299896455":"ja","subitem_1522300014469":"Other","subitem_1523261968819":"パルス変調マイクロ波"},{"subitem_1522299896455":"ja","subitem_1522300014469":"Other","subitem_1523261968819":"トーチプラズマ"},{"subitem_1522299896455":"ja","subitem_1522300014469":"Other","subitem_1523261968819":"プラズマ滅菌"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"Microwave Plasma"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"Atmospheric pressure Non-equilibrium Plasma"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"Pulse-time-modulated Microwave"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"Plasma Torch"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"Plasma Sterilization"}]},"item_1617186626617":{"attribute_name":"Description","attribute_value_mlt":[{"subitem_description":"科研費番号: 16540451","subitem_description_type":"Other"},{"subitem_description":"平成16-17年度科学研究費補助金(基盤研究(C))研究成果報告書","subitem_description_type":"Other"},{"subitem_description":"研究概要 :・円筒の金属管にスリットを入れたマイクロ波アンテナを用いて、大気圧下で非平衡プラズマを発生させる装置を開発した。この装置を用いて大気圧下で石英管内(直径20[mm]、長さ300[mm])にほぼ一様な空間分布を持つプラズマを生成することができた。生成されたプラズマは、ガス温度は約500℃で電子温度が1〜2eVの非平衡プラズマであった。放電開始電力や生成されたプラズマの電子温度等はスリットの本数に大きく依存しており、4本スリットのアンテナが最も安定してプラズマを生成・維持できることを明らかにした。\\n・上記装置で生成した大気圧非平衡プラズマに対して、マイクロ波電力をパルス化することによりその影響を調べた。パルス化しても時間平均された電子温度や電子密度にはほとんど影響はないが、ガス温度は連続発振の場合に比べ 100℃以上減少することが分かった。更に、ガス温度はパルス周期やデューティー比に依存することを明らかにした。この結果から、プラズマの非平衡度(電子温度/ガス温度)がパルス周期やデューティー比により制御できることが分かった。\\n・大気圧非平衡プラズマを材料の表面処理や滅菌などのプロセスに用いるために、石英管の一端を開放し、プラズマがトーチ状に噴出する装置を開発した。本装置を用いて直径19mmで長さ約40mm、ガス温度400℃のトーチ状の非平衡プラズマを大気圧下で生成することができた。また、実際のプロセスなどで利用されている、窒素、酸素、ヘリウム等とアルゴンとの混合ガスを用いて大気圧力下でトーチ状の非平衡プラズマを生成することができた。また、それらのプラズマ中には各種のラジカルが存在することを確認した。\\n・本装置を用いて大気圧非平衡プラズマによるプラズマ殺菌を試みた。菌を塗布したプラスッチク製の試料片に、本装置で発生させたアルゴン・酸素プラズマを照射することにより、試料片には熱的なダメージを与えずに短時間(約3秒程度)で完全に滅菌出来ることを確認した。","subitem_description_type":"Other"},{"subitem_description":"We have developed a new type of microwave plasma source which can produce a non-equilibrium cold plasma at atmospheric pressure. In this apparatus, plasma was produced in the quartz glass pipe surrounded by slit aluminum pipe which works as the microwave antenna. It was found that the discharges were stable and reproducible at wide gas pressure range from 10 Pa to atmospheric pressure. It was observed that the plasma uniformly spread over the discharge quartz pipe (diameter 20mm, length 300mm) even at atmospheric pressure. The gas temperatures of approximately 500℃ and the electron temperature of 1〜2eV have been obtained. This indicates that non-equilibrium cold plasma was produced in this apparatus.\\nThe characteristics of the atmospheric pressure non-equilibrium plasma produced by pulse-time-modulated microwave have been investigated. The gas temperature measured by a thermocouple in pulse modulated mode plasma was about 350℃ at the pulse period of 2msec and 0.8 duty ratio, whereas that obtained in the continuous wave (CW) mode plasma was about 500℃ with same time-averaged microwave power of 800W. On the other hand, the time-averaged ion saturation current in pulse modulated mode plasma was comparable to that of CW mode plasma.\\nWe have developed an atmospheric pressure ejected plasma (plasma torch) source for processing arbitrary shaped objects. The gas temperature of about 400℃ and the flame length of about 40mm have been obtained. This system has produced plasmas using a variety of gases and gas mixture, including argon, helium, oxygen and nitrogen at atmospheric pressure. This system has been applied to the sterilization of micro-organisms on the plastic plate. Small amounts of O_2 gas was added into argon plasma as reactive species for oxidizing. The killing of all micro-organisms can be accomplished in a few seconds by direct exposure to the active species of this system.","subitem_description_type":"Other"},{"subitem_description":"未公開：P.6以降（論文別刷のため)","subitem_description_type":"Other"},{"subitem_description":"研究報告書","subitem_description_type":"Other"}]},"item_1617186643794":{"attribute_name":"Publisher","attribute_value_mlt":[{"subitem_1522300295150":"ja","subitem_1522300316516":"米須章"}]},"item_1617186702042":{"attribute_name":"Language","attribute_value_mlt":[{"subitem_1551255818386":"jpn"}]},"item_1617186783814":{"attribute_name":"Identifier","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/20.500.12000/9449"}]},"item_1617186920753":{"attribute_name":"Source Identifier","attribute_value_mlt":[{"subitem_1522646500366":"NCID","subitem_1522646572813":"BA79172692"}]},"item_1617187056579":{"attribute_name":"Bibliographic Information","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2006-06","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"none"}]},"item_1617258105262":{"attribute_name":"Resource Type","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_1617265215918":{"attribute_name":"Version Type","attribute_value_mlt":[{"subitem_1522305645492":"VoR","subitem_1600292170262":"http://purl.org/coar/version/c_970fb48d4fbd8a85"}]},"item_1617605131499":{"attribute_name":"File","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","filename":"16540451.pdf","mimetype":"application/pdf","url":{"objectType":"fulltext","url":"https://u-ryukyu.repo.nii.ac.jp/record/2004468/files/16540451.pdf"},"version_id":"a95888de-e176-466a-a333-8d3d728082fe"}]},"item_title":"マイクロ波を用いた大気圧非平衡プラズマの生成およびプロセスへの応用","item_type_id":"15","owner":"1","path":["1642838403123","1642838406845"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2009-03-30"},"publish_date":"2009-03-30","publish_status":"0","recid":"2004468","relation_version_is_last":true,"title":["マイクロ波を用いた大気圧非平衡プラズマの生成およびプロセスへの応用"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2022-10-31T01:58:22.168331+00:00"}