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  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 42号
  1. 部局別インデックス
  2. 工学部

X線二結晶法によるSiO_2-GaAs基板の反りの曲線分布の測定

http://hdl.handle.net/20.500.12000/12447
http://hdl.handle.net/20.500.12000/12447
62b4871f-4b76-4830-973e-6c692de50686
名前 / ファイル ライセンス アクション
No42p71.pdf No42p71.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2009-09-14
タイトル
タイトル X線二結晶法によるSiO_2-GaAs基板の反りの曲線分布の測定
言語 ja
作成者 前濱, 剛廣

× 前濱, 剛廣

ja 前濱, 剛廣

安冨祖, 忠信

× 安冨祖, 忠信

ja 安冨祖, 忠信

Maehama, Takehiro

× Maehama, Takehiro

en Maehama, Takehiro

Afuso, Chushin

× Afuso, Chushin

en Afuso, Chushin

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 x-ray double crystal method
言語 en
主題Scheme Other
主題 gallium arsenide
言語 en
主題Scheme Other
主題 silicon dioxide
言語 en
主題Scheme Other
主題 warpage
内容記述
内容記述タイプ Other
内容記述 A new measurement method for curvature distribution of warped SiO_2-GaAs substrate using differential diffraction angles with respect to a standard rocking curve for flat substrate is presented. These rocking curves are measured by x-ray double crystal method for each reflection from the points which are selected at regular intervals on the specimen by moving the slit placed in front of the specimen. The measurement method is applied at room temperature to three cases of SiO_2-GaAs substrate whose SiO_2 film has been deposited uniformly by CVD at 350℃. These three cases are: i) SiO_2 film deposited on the whole substrate, ii) SiO_2 film partially removed, iii) SiO_2 film completely removed. The results of measurements reveal the following facts. SiO_2-GaAs substrate is warped uniformly independent of the distribution of the lattice defects in the substrate due to the difference of thermal expansion coefficient between SiO_2 film and GaAs crystal. Namely the SiO_2 film on the GaAs crystal is in a state of compression. There is an appreciable difference of the curvature between those for SiO_2 film deposited area and SiO_2 film removed area.
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/12447
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 42, p. 71-78
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