ログイン
言語:

WEKO3

  • トップ
  • ランキング
To
lat lon distance
To

Field does not validate



インデックスリンク

インデックスツリー

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

{"_buckets": {"deposit": "3b543ffb-7ecf-4ead-b1f2-d6c1f30d56eb"}, "_deposit": {"id": "2005206", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "2005206"}, "status": "published"}, "_oai": {"id": "oai:u-ryukyu.repo.nii.ac.jp:02005206", "sets": ["1642837875711", "1642838406845"]}, "author_link": [], "item_1617186331708": {"attribute_name": "Title", "attribute_value_mlt": [{"subitem_1551255647225": "a-C:H\u8584\u819c\u306e\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306b\u3088\u308b\u69cb\u9020\u5909\u5316", "subitem_1551255648112": "ja"}, {"subitem_1551255647225": "Structural Changes of Hydrogenated Amorphous Carbon Thin Films by Plasma Treatment", "subitem_1551255648112": "en"}]}, "item_1617186419668": {"attribute_name": "Creator", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u52e2\u7406\u5ba2, \u52dd\u5247", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u5c71\u4e0b, \u79c0\u548c", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u6bd4\u5609, \u6643", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u6e21\u4e45\u5730, \u5be6", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "Serikyaku, Katsunori", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Yamashita, Hidekazu", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Higa, Akira", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Toguchi, Minoru", "creatorNameLang": "en"}]}]}, "item_1617186476635": {"attribute_name": "Access Rights", "attribute_value_mlt": [{"subitem_1522299639480": "open access", "subitem_1600958577026": "http://purl.org/coar/access_right/c_abf2"}]}, "item_1617186609386": {"attribute_name": "Subject", "attribute_value_mlt": [{"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "hydrogenated amorphous carbon"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "inductively coupled plasma (ICP)"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "infrared (IR)"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "UV/Visual (VIS)"}]}, "item_1617186626617": {"attribute_name": "Description", "attribute_value_mlt": [{"subitem_description": "This paper is desaibed about structural changes of hydrogenated amorphous carbon films (a-C:H) exposed by inductively coupled hydrogen plasma The a-C:H films were prepared by magnetron sputtering using VHF plasma. Structure and optical gap of the plasma exposed films were investigated by infrared (IR) absorption and UV/Visual (VIS) absorption. From IR measurements, it is found that hydrogen concentration in the films decreased with increasing exposed time. The number of sp^3-CH_3 and sp^2-CH bonds in the films decreased as compared with sp^3-CH, sp^3-CH_2 in the films by hydrogen plasma treatment. The optical gap decreased with the bonding hydrogen concentration.", "subitem_description_type": "Other"}, {"subitem_description": "\u7d00\u8981\u8ad6\u6587", "subitem_description_type": "Other"}]}, "item_1617186643794": {"attribute_name": "Publisher", "attribute_value_mlt": [{"subitem_1522300295150": "ja", "subitem_1522300316516": "\u7409\u7403\u5927\u5b66\u5de5\u5b66\u90e8"}]}, "item_1617186702042": {"attribute_name": "Language", "attribute_value_mlt": [{"subitem_1551255818386": "jpn"}]}, "item_1617186783814": {"attribute_name": "Identifier", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/20.500.12000/14427"}]}, "item_1617186920753": {"attribute_name": "Source Identifier", "attribute_value_mlt": [{"subitem_1522646500366": "ISSN", "subitem_1522646572813": "0389-102X"}, {"subitem_1522646500366": "NCID", "subitem_1522646572813": "AN0025048X"}]}, "item_1617186941041": {"attribute_name": "Source Title", "attribute_value_mlt": [{"subitem_1522650068558": "ja", "subitem_1522650091861": "\u7409\u7403\u5927\u5b66\u5de5\u5b66\u90e8\u7d00\u8981"}]}, "item_1617187056579": {"attribute_name": "Bibliographic Information", "attribute_value_mlt": [{"bibliographicIssueNumber": "58", "bibliographicPageEnd": "103", "bibliographicPageStart": "99"}]}, "item_1617258105262": {"attribute_name": "Resource Type", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_1617265215918": {"attribute_name": "Version Type", "attribute_value_mlt": [{"subitem_1522305645492": "VoR", "subitem_1600292170262": "http://purl.org/coar/version/c_970fb48d4fbd8a85"}]}, "item_1617605131499": {"attribute_name": "File", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_access", "download_preview_message": "", "file_order": 0, "filename": "No58p099.pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "", "size": 0, "url": {"objectType": "fulltext", "url": "https://u-ryukyu.repo.nii.ac.jp/record/2005206/files/No58p099.pdf"}, "version_id": "d7a1f28e-3c1f-4ce0-900c-ca190bf612c2"}]}, "item_title": "a-C:H\u8584\u819c\u306e\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306b\u3088\u308b\u69cb\u9020\u5909\u5316", "item_type_id": "15", "owner": "1", "path": ["1642837875711", "1642838406845"], "permalink_uri": "http://hdl.handle.net/20.500.12000/14427", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-04"}, "publish_date": "2010-01-04", "publish_status": "0", "recid": "2005206", "relation": {}, "relation_version_is_last": true, "title": ["a-C:H\u8584\u819c\u306e\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306b\u3088\u308b\u69cb\u9020\u5909\u5316"], "weko_shared_id": -1}
  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 58号
  1. 部局別インデックス
  2. 工学部

a-C:H薄膜のプラズマ処理による構造変化

http://hdl.handle.net/20.500.12000/14427
http://hdl.handle.net/20.500.12000/14427
b47cb7b8-1c17-4461-80c9-599681366955
名前 / ファイル ライセンス アクション
No58p099.pdf No58p099.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2010-01-04
タイトル
タイトル a-C:H薄膜のプラズマ処理による構造変化
言語 ja
作成者 勢理客, 勝則

× 勢理客, 勝則

ja 勢理客, 勝則

山下, 秀和

× 山下, 秀和

ja 山下, 秀和

比嘉, 晃

× 比嘉, 晃

ja 比嘉, 晃

渡久地, 實

× 渡久地, 實

ja 渡久地, 實

Serikyaku, Katsunori

× Serikyaku, Katsunori

en Serikyaku, Katsunori

Yamashita, Hidekazu

× Yamashita, Hidekazu

en Yamashita, Hidekazu

Higa, Akira

× Higa, Akira

en Higa, Akira

Toguchi, Minoru

× Toguchi, Minoru

en Toguchi, Minoru

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 hydrogenated amorphous carbon
言語 en
主題Scheme Other
主題 inductively coupled plasma (ICP)
言語 en
主題Scheme Other
主題 infrared (IR)
言語 en
主題Scheme Other
主題 UV/Visual (VIS)
内容記述
内容記述タイプ Other
内容記述 This paper is desaibed about structural changes of hydrogenated amorphous carbon films (a-C:H) exposed by inductively coupled hydrogen plasma The a-C:H films were prepared by magnetron sputtering using VHF plasma. Structure and optical gap of the plasma exposed films were investigated by infrared (IR) absorption and UV/Visual (VIS) absorption. From IR measurements, it is found that hydrogen concentration in the films decreased with increasing exposed time. The number of sp^3-CH_3 and sp^2-CH bonds in the films decreased as compared with sp^3-CH, sp^3-CH_2 in the films by hydrogen plasma treatment. The optical gap decreased with the bonding hydrogen concentration.
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/14427
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 58, p. 99-103
戻る
0
views
See details
Views

Versions

Ver.1 2022-01-28 01:05:05.232766
Show All versions

Share

Mendeley Twitter Facebook Print Addthis

Cite as

エクスポート

OAI-PMH
  • OAI-PMH JPCOAR
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON

確認


Powered by WEKO3


Powered by WEKO3