{"_buckets": {"deposit": "3b543ffb-7ecf-4ead-b1f2-d6c1f30d56eb"}, "_deposit": {"id": "2005206", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "2005206"}, "status": "published"}, "_oai": {"id": "oai:u-ryukyu.repo.nii.ac.jp:02005206", "sets": ["1642837875711", "1642838406845"]}, "author_link": [], "item_1617186331708": {"attribute_name": "Title", "attribute_value_mlt": [{"subitem_1551255647225": "a-C:H薄膜のプラズマ処理による構造変化", "subitem_1551255648112": "ja"}, {"subitem_1551255647225": "Structural Changes of Hydrogenated Amorphous Carbon Thin Films by Plasma Treatment", "subitem_1551255648112": "en"}]}, "item_1617186419668": {"attribute_name": "Creator", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "勢理客, 勝則", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "山下, 秀和", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "比嘉, 晃", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "渡久地, 實", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "Serikyaku, Katsunori", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Yamashita, Hidekazu", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Higa, Akira", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Toguchi, Minoru", "creatorNameLang": "en"}]}]}, "item_1617186476635": {"attribute_name": "Access Rights", "attribute_value_mlt": [{"subitem_1522299639480": "open access", "subitem_1600958577026": "http://purl.org/coar/access_right/c_abf2"}]}, "item_1617186609386": {"attribute_name": "Subject", "attribute_value_mlt": [{"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "hydrogenated amorphous carbon"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "inductively coupled plasma (ICP)"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "infrared (IR)"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "UV/Visual (VIS)"}]}, "item_1617186626617": {"attribute_name": "Description", "attribute_value_mlt": [{"subitem_description": "This paper is desaibed about structural changes of hydrogenated amorphous carbon films (a-C:H) exposed by inductively coupled hydrogen plasma The a-C:H films were prepared by magnetron sputtering using VHF plasma. Structure and optical gap of the plasma exposed films were investigated by infrared (IR) absorption and UV/Visual (VIS) absorption. From IR measurements, it is found that hydrogen concentration in the films decreased with increasing exposed time. The number of sp^3-CH_3 and sp^2-CH bonds in the films decreased as compared with sp^3-CH, sp^3-CH_2 in the films by hydrogen plasma treatment. The optical gap decreased with the bonding hydrogen concentration.", "subitem_description_type": "Other"}, {"subitem_description": "紀要論文", "subitem_description_type": "Other"}]}, "item_1617186643794": {"attribute_name": "Publisher", "attribute_value_mlt": [{"subitem_1522300295150": "ja", "subitem_1522300316516": "琉球大学工学部"}]}, "item_1617186702042": {"attribute_name": "Language", "attribute_value_mlt": [{"subitem_1551255818386": "jpn"}]}, "item_1617186783814": {"attribute_name": "Identifier", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/20.500.12000/14427"}]}, "item_1617186920753": {"attribute_name": "Source Identifier", "attribute_value_mlt": [{"subitem_1522646500366": "ISSN", "subitem_1522646572813": "0389-102X"}, {"subitem_1522646500366": "NCID", "subitem_1522646572813": "AN0025048X"}]}, "item_1617186941041": {"attribute_name": "Source Title", "attribute_value_mlt": [{"subitem_1522650068558": "ja", "subitem_1522650091861": "琉球大学工学部紀要"}]}, "item_1617187056579": {"attribute_name": "Bibliographic Information", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1999-09", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "58", "bibliographicPageEnd": "103", "bibliographicPageStart": "99"}]}, "item_1617258105262": {"attribute_name": "Resource Type", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_1617265215918": {"attribute_name": "Version Type", "attribute_value_mlt": [{"subitem_1522305645492": "VoR", "subitem_1600292170262": "http://purl.org/coar/version/c_970fb48d4fbd8a85"}]}, "item_1617605131499": {"attribute_name": "File", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_access", "download_preview_message": "", "file_order": 0, "filename": "No58p099.pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "", "size": 0, "url": {"objectType": "fulltext", "url": "https://u-ryukyu.repo.nii.ac.jp/record/2005206/files/No58p099.pdf"}, "version_id": "d7a1f28e-3c1f-4ce0-900c-ca190bf612c2"}]}, "item_title": "a-C:H薄膜のプラズマ処理による構造変化", "item_type_id": "15", "owner": "1", "path": ["1642837875711", "1642838406845"], "permalink_uri": "http://hdl.handle.net/20.500.12000/14427", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-04"}, "publish_date": "2010-01-04", "publish_status": "0", "recid": "2005206", "relation": {}, "relation_version_is_last": true, "title": ["a-C:H薄膜のプラズマ処理による構造変化"], "weko_shared_id": -1}