{"created":"2022-01-28T01:05:02.870508+00:00","id":2005206,"links":{},"metadata":{"_buckets":{"deposit":"3b543ffb-7ecf-4ead-b1f2-d6c1f30d56eb"},"_deposit":{"id":"2005206","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"2005206"},"status":"published"},"_oai":{"id":"oai:u-ryukyu.repo.nii.ac.jp:02005206","sets":["1642837622505:1642837855274:1642837875711","1642838403551:1642838406845"]},"author_link":[],"item_1617186331708":{"attribute_name":"Title","attribute_value_mlt":[{"subitem_1551255647225":"a-C:H薄膜のプラズマ処理による構造変化","subitem_1551255648112":"ja"},{"subitem_1551255647225":"Structural Changes of Hydrogenated Amorphous Carbon Thin Films by Plasma Treatment","subitem_1551255648112":"en"}]},"item_1617186419668":{"attribute_name":"Creator","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"勢理客, 勝則","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"山下, 秀和","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"比嘉, 晃","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"渡久地, 實","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"Serikyaku, Katsunori","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Yamashita, Hidekazu","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Higa, Akira","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Toguchi, Minoru","creatorNameLang":"en"}]}]},"item_1617186476635":{"attribute_name":"Access Rights","attribute_value_mlt":[{"subitem_1522299639480":"open access","subitem_1600958577026":"http://purl.org/coar/access_right/c_abf2"}]},"item_1617186609386":{"attribute_name":"Subject","attribute_value_mlt":[{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"hydrogenated amorphous carbon"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"inductively coupled plasma (ICP)"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"infrared (IR)"},{"subitem_1522299896455":"en","subitem_1522300014469":"Other","subitem_1523261968819":"UV/Visual (VIS)"}]},"item_1617186626617":{"attribute_name":"Description","attribute_value_mlt":[{"subitem_description":"This paper is desaibed about structural changes of hydrogenated amorphous carbon films (a-C:H) exposed by inductively coupled hydrogen plasma The a-C:H films were prepared by magnetron sputtering using VHF plasma. Structure and optical gap of the plasma exposed films were investigated by infrared (IR) absorption and UV/Visual (VIS) absorption. From IR measurements, it is found that hydrogen concentration in the films decreased with increasing exposed time. The number of sp^3-CH_3 and sp^2-CH bonds in the films decreased as compared with sp^3-CH, sp^3-CH_2 in the films by hydrogen plasma treatment. The optical gap decreased with the bonding hydrogen concentration.","subitem_description_type":"Other"},{"subitem_description":"紀要論文","subitem_description_type":"Other"}]},"item_1617186643794":{"attribute_name":"Publisher","attribute_value_mlt":[{"subitem_1522300295150":"ja","subitem_1522300316516":"琉球大学工学部"}]},"item_1617186702042":{"attribute_name":"Language","attribute_value_mlt":[{"subitem_1551255818386":"jpn"}]},"item_1617186783814":{"attribute_name":"Identifier","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/20.500.12000/14427"}]},"item_1617186920753":{"attribute_name":"Source Identifier","attribute_value_mlt":[{"subitem_1522646500366":"ISSN","subitem_1522646572813":"0389-102X"},{"subitem_1522646500366":"NCID","subitem_1522646572813":"AN0025048X"}]},"item_1617186941041":{"attribute_name":"Source Title","attribute_value_mlt":[{"subitem_1522650068558":"ja","subitem_1522650091861":"琉球大学工学部紀要"}]},"item_1617187056579":{"attribute_name":"Bibliographic Information","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-09","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"58","bibliographicPageEnd":"103","bibliographicPageStart":"99"}]},"item_1617258105262":{"attribute_name":"Resource Type","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_1617265215918":{"attribute_name":"Version Type","attribute_value_mlt":[{"subitem_1522305645492":"VoR","subitem_1600292170262":"http://purl.org/coar/version/c_970fb48d4fbd8a85"}]},"item_1617605131499":{"attribute_name":"File","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","filename":"No58p099.pdf","mimetype":"application/pdf","url":{"objectType":"fulltext","url":"https://u-ryukyu.repo.nii.ac.jp/record/2005206/files/No58p099.pdf"},"version_id":"d7a1f28e-3c1f-4ce0-900c-ca190bf612c2"}]},"item_title":"a-C:H薄膜のプラズマ処理による構造変化","item_type_id":"15","owner":"1","path":["1642837875711","1642838406845"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2010-01-04"},"publish_date":"2010-01-04","publish_status":"0","recid":"2005206","relation_version_is_last":true,"title":["a-C:H薄膜のプラズマ処理による構造変化"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2022-10-31T02:33:09.238113+00:00"}