@article{oai:u-ryukyu.repo.nii.ac.jp:02005209,
 author = {渡久地, 実 and 比嘉, 晃 and 島袋, 敏行 and Toguchi, Minoru and Higa, Akira and Shimabukuro, Toshiyuki},
 issue = {44},
 journal = {琉球大学工学部紀要},
 month = {Sep},
 note = {High T_e superconducting YBaCuO thin film have been prepared on MgO (100) substrate by RF magnetron sputtering using single target under sputtering gas pressures ranging from 5 mTorr to 1Torr. Critical temperature T_<con> of the films on the substrates positioned right above target center decreased with increasing sputtering gas pressure, while that of the films on substrates positioned right above erosion area decreased at pressure below 50mTorr. The composition ratios Ba/Y and Cu/Y of films were increased with increasing sputtering gas pressure. This tendency was remarkable at position right above erosion area., 紀要論文},
 pages = {137--144},
 title = {RFマグネトロンスパッタリング法によるYBaCuO超伝導薄膜の作製},
 year = {1992}
}