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  1. 学術雑誌論文
  2. その他
  1. 部局別インデックス
  2. 工学部

Low-temperature poly-Si TFTs of metal source and drain using blue-laser-diode annealing (BLDA)

http://hdl.handle.net/20.500.12000/47327
http://hdl.handle.net/20.500.12000/47327
8b3c5f6e-a717-4a31-b148-b3e081175a47
名前 / ファイル ライセンス アクション
Low Low temperature poly Si TFTs of metal source and drain using blue laser diode annealing BLDA.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2020-11-26
タイトル
タイトル Low-temperature poly-Si TFTs of metal source and drain using blue-laser-diode annealing (BLDA)
言語 en
作成者 Sugihara, Kouya

× Sugihara, Kouya

en Sugihara, Kouya

Shimoda, Kiyoharu

× Shimoda, Kiyoharu

en Shimoda, Kiyoharu

Okada, Tatsuya

× Okada, Tatsuya

en Okada, Tatsuya

Noguchib, Takashi

× Noguchib, Takashi

en Noguchib, Takashi

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利情報
言語 en
権利情報 Creative Commons Attribution 4.0
言語 en
権利情報Resource http://creativecommons.org/licenses/by/4.0/
権利情報 http://creativecommons.org/licenses/by/4.0/
主題
言語 en
主題Scheme Other
主題 AMD
言語 en
主題Scheme Other
主題 flexible display
言語 en
主題Scheme Other
主題 material and components
内容記述
内容記述タイプ Other
内容記述 Blue-laser-diode annealing (BLDA) in the continuous wave mode was performed for sputtered silicon (Si) films. Polycrystalline silicon (poly-Si) thin-film transistors (TFTs) were fabricated on a glass substrate. For the source and drain formation, titanium (Ti) was evaporated to make the metal directly contact the channel Si film without adopting n+ doping. The improvement of the drain current was confirmed after hydrogen annealing at 400°C, and the typical poly-Si TFT characteristic with 50 cm2/Vs deduced effective carrier mobility was successfully observed. As the low-cost TFT fabrication without ion implantation becomes feasible, the low-temperature fabrication of poly-Si TFTs using BLDA is expected.
内容記述タイプ Other
内容記述 論文
出版者
言語 en
出版者 Taylor & Francis
言語
言語 eng
資源タイプ
資源タイプ journal article
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/47327
識別子タイプ HDL
関連情報
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1080/15980316.2017.1372315
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1080/15980316.2017.1372315
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 1598-0316
収録物識別子タイプ ISSN
収録物識別子 2158-1606
収録物名
言語 en
収録物名 Journal of Information Display
書誌情報
巻 18, 号 4, p. 173-176
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