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  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 39号
  1. 部局別インデックス
  2. 工学部

変形バイメタルモデルによる拡散不純物表面濃度の決定

http://hdl.handle.net/20.500.12000/12448
http://hdl.handle.net/20.500.12000/12448
1b6164cd-3d18-4d3b-99b3-d458c5348ece
名前 / ファイル ライセンス アクション
No39p87.pdf No39p87.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2009-09-14
タイトル
タイトル 変形バイメタルモデルによる拡散不純物表面濃度の決定
言語 ja
作成者 前濱, 剛廣

× 前濱, 剛廣

ja 前濱, 剛廣

宮里, 博明

× 宮里, 博明

ja 宮里, 博明

宮城, 洋一郎

× 宮城, 洋一郎

ja 宮城, 洋一郎

安冨祖, 忠信

× 安冨祖, 忠信

ja 安冨祖, 忠信

Maehama, Takehiro

× Maehama, Takehiro

en Maehama, Takehiro

Miyasato, Hiroaki

× Miyasato, Hiroaki

en Miyasato, Hiroaki

Miyagi, Yoichiro

× Miyagi, Yoichiro

en Miyagi, Yoichiro

Afuso, Chushin

× Afuso, Chushin

en Afuso, Chushin

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 Diffusion
言語 en
主題Scheme Other
主題 Surface concentration
言語 en
主題Scheme Other
主題 Gallium arsenide
言語 en
主題Scheme Other
主題 Cadmium
言語 en
主題Scheme Other
主題 Warpage
言語 en
主題Scheme Other
主題 X-ray double crystal method
内容記述
内容記述タイプ Other
内容記述 A new method for measuring the surface concentration of the diffused impurity atoms is proposed. Because of the lattice distortion due to the distribution of the diffused impurity atoms, the substrate crystal is warped like bimetals. The equations to calculate the warpage angle of the substrate crystal are derived. The surface concentration of the diffused impurity of the substrate is decided so that the value calculated by the equations fits in the measured value of the warpage angle. The method was actually applied to {l00} GaAs substrates in which Cd atoms had been diffused at 1000℃ and 900℃ respectively. The calculated values of the warpage angle of the substrate assuming the complementary error function for the Cd distribution are in good agreement with the experimental values. The Cd-surface concentrations diffused at 1000℃ and 900℃ were decided as 1.3×10^<19> and 2×10^<18>cm^<-3>, respectively. For the reduction of the warpage angle when the diffused layer was removed, the theoretical values were also in good agreement with the experimental values. From these facts, therefore, the validity of the assumption of the complementary error function for the Cd-distribution were confirmed.
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/12448
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 39, p. 87-97
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