{"_buckets": {"deposit": "984ee56a-03cb-4024-a9a0-414762456b06"}, "_deposit": {"id": "2004874", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "2004874"}, "status": "published"}, "_oai": {"id": "oai:u-ryukyu.repo.nii.ac.jp:02004874", "sets": ["1642837865010", "1642838406845"]}, "author_link": [], "item_1617186331708": {"attribute_name": "Title", "attribute_value_mlt": [{"subitem_1551255647225": "\u5909\u5f62\u30d0\u30a4\u30e1\u30bf\u30eb\u30e2\u30c7\u30eb\u306b\u3088\u308b\u62e1\u6563\u4e0d\u7d14\u7269\u8868\u9762\u6fc3\u5ea6\u306e\u6c7a\u5b9a", "subitem_1551255648112": "ja"}, {"subitem_1551255647225": "Determination of Surface Concentration of Diffused Impurity by the Modified Bimetallic Model.", "subitem_1551255648112": "en"}]}, "item_1617186419668": {"attribute_name": "Creator", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u524d\u6ff1, \u525b\u5ee3", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u5bae\u91cc, \u535a\u660e", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u5bae\u57ce, \u6d0b\u4e00\u90ce", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "\u5b89\u51a8\u7956, \u5fe0\u4fe1", "creatorNameLang": "ja"}]}, {"creatorNames": [{"creatorName": "Maehama, Takehiro", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Miyasato, Hiroaki", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Miyagi, Yoichiro", "creatorNameLang": "en"}]}, {"creatorNames": [{"creatorName": "Afuso, Chushin", "creatorNameLang": "en"}]}]}, "item_1617186476635": {"attribute_name": "Access Rights", "attribute_value_mlt": [{"subitem_1522299639480": "open access", "subitem_1600958577026": "http://purl.org/coar/access_right/c_abf2"}]}, "item_1617186609386": {"attribute_name": "Subject", "attribute_value_mlt": [{"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "Diffusion"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "Surface concentration"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "Gallium arsenide"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "Cadmium"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "Warpage"}, {"subitem_1522299896455": "en", "subitem_1522300014469": "Other", "subitem_1523261968819": "X-ray double crystal method"}]}, "item_1617186626617": {"attribute_name": "Description", "attribute_value_mlt": [{"subitem_description": "A new method for measuring the surface concentration of the diffused impurity atoms is proposed. Because of the lattice distortion due to the distribution of the diffused impurity atoms, the substrate crystal is warped like bimetals. The equations to calculate the warpage angle of the substrate crystal are derived. The surface concentration of the diffused impurity of the substrate is decided so that the value calculated by the equations fits in the measured value of the warpage angle. The method was actually applied to {l00} GaAs substrates in  which Cd atoms had been diffused at 1000\u2103 and 900\u2103 respectively. The calculated values of the warpage angle of the substrate assuming the complementary error function for the Cd distribution are in good agreement with the experimental values. The Cd-surface concentrations diffused at 1000\u2103 and 900\u2103 were decided as 1.3\u00d710^\u003c19\u003e and 2\u00d710^\u003c18\u003ecm^\u003c-3\u003e, respectively. For the reduction of the warpage angle when the  diffused layer was removed, the theoretical values were also in good agreement with the experimental values. From these facts, therefore, the  validity of the assumption of the complementary error function for the Cd-distribution were confirmed.", "subitem_description_type": "Other"}, {"subitem_description": "\u7d00\u8981\u8ad6\u6587", "subitem_description_type": "Other"}]}, "item_1617186643794": {"attribute_name": "Publisher", "attribute_value_mlt": [{"subitem_1522300295150": "ja", "subitem_1522300316516": "\u7409\u7403\u5927\u5b66\u5de5\u5b66\u90e8"}]}, "item_1617186702042": {"attribute_name": "Language", "attribute_value_mlt": [{"subitem_1551255818386": "jpn"}]}, "item_1617186783814": {"attribute_name": "Identifier", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/20.500.12000/12448"}]}, "item_1617186920753": {"attribute_name": "Source Identifier", "attribute_value_mlt": [{"subitem_1522646500366": "ISSN", "subitem_1522646572813": "0389-102X"}, {"subitem_1522646500366": "NCID", "subitem_1522646572813": "AN0025048X"}]}, "item_1617186941041": {"attribute_name": "Source Title", "attribute_value_mlt": [{"subitem_1522650068558": "ja", "subitem_1522650091861": "\u7409\u7403\u5927\u5b66\u5de5\u5b66\u90e8\u7d00\u8981"}]}, "item_1617187056579": {"attribute_name": "Bibliographic Information", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1990-03", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "39", "bibliographicPageEnd": "97", "bibliographicPageStart": "87"}]}, "item_1617258105262": {"attribute_name": "Resource Type", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_1617265215918": {"attribute_name": "Version Type", "attribute_value_mlt": [{"subitem_1522305645492": "VoR", "subitem_1600292170262": "http://purl.org/coar/version/c_970fb48d4fbd8a85"}]}, "item_1617605131499": {"attribute_name": "File", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_access", "download_preview_message": "", "file_order": 0, "filename": "No39p87.pdf", "future_date_message": "", "is_thumbnail": false, "mimetype": "", "size": 0, "url": {"objectType": "fulltext", "url": "https://u-ryukyu.repo.nii.ac.jp/record/2004874/files/No39p87.pdf"}, "version_id": "484fd7a8-a5e5-465c-a9a0-5f5a8bbcf6b6"}]}, "item_title": "\u5909\u5f62\u30d0\u30a4\u30e1\u30bf\u30eb\u30e2\u30c7\u30eb\u306b\u3088\u308b\u62e1\u6563\u4e0d\u7d14\u7269\u8868\u9762\u6fc3\u5ea6\u306e\u6c7a\u5b9a", "item_type_id": "15", "owner": "1", "path": ["1642837865010", "1642838406845"], "permalink_uri": "http://hdl.handle.net/20.500.12000/12448", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2009-09-14"}, "publish_date": "2009-09-14", "publish_status": "0", "recid": "2004874", "relation": {}, "relation_version_is_last": true, "title": ["\u5909\u5f62\u30d0\u30a4\u30e1\u30bf\u30eb\u30e2\u30c7\u30eb\u306b\u3088\u308b\u62e1\u6563\u4e0d\u7d14\u7269\u8868\u9762\u6fc3\u5ea6\u306e\u6c7a\u5b9a"], "weko_shared_id": -1}