Item type |
デフォルトアイテムタイプ(フル)(1) |
公開日 |
2009-09-07 |
タイトル |
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タイトル |
X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪分布の測定 |
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言語 |
ja |
タイトル |
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タイトル |
Measurement of Lattice Strain Distribution of Striped Si0_2/GaAs Substrate by X-ray Double Crystal Method |
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言語 |
en |
作成者 |
前濱, 剛廣
新里, 樹
安冨祖, 忠信
Maehama, Takehiro
Shinzato, Itsuki
Afuso, Chusin
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アクセス権 |
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アクセス権 |
open access |
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アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
主題 |
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言語 |
en |
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主題Scheme |
Other |
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主題 |
X-ray double crystal method |
主題 |
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言語 |
en |
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主題Scheme |
Other |
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主題 |
Gallium arsenide |
主題 |
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言語 |
en |
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主題Scheme |
Other |
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主題 |
Silicon dioxide film |
主題 |
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言語 |
en |
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主題Scheme |
Other |
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主題 |
Lattice strain |
内容記述 |
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内容記述タイプ |
Other |
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内容記述 |
Two measurement methods, slit-slide method and X-ray topography were applied to measure relative lattice strain distribution of striped SiO_2/GaAs. In the slit-slide method the fine distribution of the lattice strain was not detected. because X-ray beams through the slit of 26μm was too broad to focus on the area where the lattice strain varied abruptly. On the other hand X-ray topographs showed clear contrast \nwhich represents the lattice strain distribution. Each time X-ray incidence angle was increased or decreased by several second of arc from Bragg angle the topograph was taken. By comparing the contrast of these topographs, the lattice strain distribution was determined. The results shows that the strain distributes in narrow areas (about 10-μm width) along the borderline between d-stripe and r-stripe. The strain distributes in the narrow area along left and right borderlines of the d-stripe from +128" to -48"and from +56" to -128", respectively. The difference of the strain distribution between the left and the right border areas shows that the lattice planes in both border areas are tilted in opposite directions. |
内容記述 |
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内容記述タイプ |
Other |
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内容記述 |
紀要論文 |
出版者 |
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言語 |
ja |
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出版者 |
琉球大学工学部 |
言語 |
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言語 |
jpn |
資源タイプ |
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資源タイプ |
departmental bulletin paper |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
出版タイプ |
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出版タイプ |
VoR |
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出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
識別子 |
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識別子 |
http://hdl.handle.net/20.500.12000/12407 |
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識別子タイプ |
HDL |
収録物識別子 |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
0389-102X |
収録物識別子 |
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収録物識別子タイプ |
NCID |
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収録物識別子 |
AN0025048X |
収録物名 |
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言語 |
ja |
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収録物名 |
琉球大学工学部紀要 |
書誌情報 |
号 48,
p. 147-158,
発行日 1994-09-01
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