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  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 48号
  1. 部局別インデックス
  2. 工学部

X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪分布の測定

http://hdl.handle.net/20.500.12000/12407
http://hdl.handle.net/20.500.12000/12407
708708d2-0092-440a-9d94-171eea8b0dee
名前 / ファイル ライセンス アクション
No48p147.pdf No48p147.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2009-09-07
タイトル
タイトル X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪分布の測定
言語 ja
作成者 前濱, 剛廣

× 前濱, 剛廣

ja 前濱, 剛廣

新里, 樹

× 新里, 樹

ja 新里, 樹

安冨祖, 忠信

× 安冨祖, 忠信

ja 安冨祖, 忠信

Maehama, Takehiro

× Maehama, Takehiro

en Maehama, Takehiro

Shinzato, Itsuki

× Shinzato, Itsuki

en Shinzato, Itsuki

Afuso, Chusin

× Afuso, Chusin

en Afuso, Chusin

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 X-ray double crystal method
言語 en
主題Scheme Other
主題 Gallium arsenide
言語 en
主題Scheme Other
主題 Silicon dioxide film
言語 en
主題Scheme Other
主題 Lattice strain
内容記述
内容記述タイプ Other
内容記述 Two measurement methods, slit-slide method and X-ray topography were applied to measure relative lattice strain distribution of striped SiO_2/GaAs. In the slit-slide method the fine distribution of the lattice strain was not detected. because X-ray beams through the slit of 26μm was too broad to focus on the area where the lattice strain varied abruptly. On the other hand X-ray topographs showed clear contrast \nwhich represents the lattice strain distribution. Each time X-ray incidence angle was increased or decreased by several second of arc from Bragg angle the topograph was taken. By comparing the contrast of these topographs, the lattice strain distribution was determined. The results shows that the strain distributes in narrow areas (about 10-μm width) along the borderline between d-stripe and r-stripe. The strain distributes in the narrow area along left and right borderlines of the d-stripe from +128" to -48"and from +56" to -128", respectively. The difference of the strain distribution between the left and the right border areas shows that the lattice planes in both border areas are tilted in opposite directions.
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/12407
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 48, p. 147-158
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