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  1. 紀要論文
  2. 琉球大学工学部紀要
  3. 47号
  1. 部局別インデックス
  2. 工学部

X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪の測定

http://hdl.handle.net/20.500.12000/12408
http://hdl.handle.net/20.500.12000/12408
82da3cf9-6e6a-4732-9380-536fba7b2de9
名前 / ファイル ライセンス アクション
No47p77.pdf No47p77.pdf
Item type デフォルトアイテムタイプ(フル)(1)
公開日 2009-09-07
タイトル
タイトル X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪の測定
言語 ja
作成者 前濱, 剛廣

× 前濱, 剛廣

ja 前濱, 剛廣

新里, 樹

× 新里, 樹

ja 新里, 樹

安冨祖, 忠信

× 安冨祖, 忠信

ja 安冨祖, 忠信

Maehama, Takehiro

× Maehama, Takehiro

en Maehama, Takehiro

Shinzato, Itsuki

× Shinzato, Itsuki

en Shinzato, Itsuki

Afuso, Chusin

× Afuso, Chusin

en Afuso, Chusin

アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
主題
言語 en
主題Scheme Other
主題 X-ray double crystal method
言語 en
主題Scheme Other
主題 Gallium arsenide
言語 en
主題Scheme Other
主題 Silicon dioxide film
言語 en
主題Scheme Other
主題 Lattice strain
内容記述
内容記述タイプ Other
内容記述 A measurement method for relative lattice strain of striped Si0_2/GaAs and the results of the measurements are presented. As the fundamental of the method the peak - splitting angle of the rocking curve of X - ray double crystal method due to the relative lattice strain is used. The method is applied to some samples with different stripe widths. The results of the measurements reveal the following facts. The relative lattice strain varies inversely as the stripe width. The equation of the relationship is given by assuming the exponential distribution of the lattice strain. The relative lattice strain is divided into two terms by elastic theory. One is the spacing strain of the parallel atomic planes and the other is the tilting strain of the planes.
内容記述タイプ Other
内容記述 紀要論文
出版者
言語 ja
出版者 琉球大学工学部
言語
言語 jpn
資源タイプ
資源タイプ departmental bulletin paper
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
識別子
識別子 http://hdl.handle.net/20.500.12000/12408
識別子タイプ HDL
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0389-102X
収録物識別子タイプ NCID
収録物識別子 AN0025048X
収録物名
言語 ja
収録物名 琉球大学工学部紀要
書誌情報
号 47, p. 77-87
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