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Si-doped GaAs単結晶の転位の上昇と二次元欠陥 -エッチング法による観測-
http://hdl.handle.net/20.500.12000/12489
http://hdl.handle.net/20.500.12000/124898fefe69e-5f7d-4f48-bdbb-077696fe89b3
名前 / ファイル | ライセンス | アクション |
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No28p047.pdf
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Item type | デフォルトアイテムタイプ(フル)(1) | |||||||||
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公開日 | 2009-09-15 | |||||||||
タイトル | ||||||||||
タイトル | Si-doped GaAs単結晶の転位の上昇と二次元欠陥 -エッチング法による観測- | |||||||||
言語 | ja | |||||||||
タイトル | ||||||||||
タイトル | Observation of Dislocation Climbing with Two-dimensional Defects in Si-doped GaAs Crystal by Etching Technique | |||||||||
言語 | en | |||||||||
作成者 |
前濱, 剛廣
× 前濱, 剛廣
× Maehama, Takehiro
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アクセス権 | ||||||||||
アクセス権 | open access | |||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||
主題 | ||||||||||
言語 | en | |||||||||
主題Scheme | Other | |||||||||
主題 | Defect | |||||||||
主題 | ||||||||||
言語 | en | |||||||||
主題Scheme | Other | |||||||||
主題 | Dislocation | |||||||||
主題 | ||||||||||
言語 | en | |||||||||
主題Scheme | Other | |||||||||
主題 | Etch figure | |||||||||
主題 | ||||||||||
言語 | en | |||||||||
主題Scheme | Other | |||||||||
主題 | Gallium arrsenide | |||||||||
内容記述 | ||||||||||
内容記述タイプ | Other | |||||||||
内容記述 | Si-doped and non-doped GaAs crystals are heat-treated for 72 hours at 1000℃ under 600 Torr arrsenic pressure. Arrow-shaped etch figures, which have never been found on as-grown Si-doped GaAs crystals, are formed on As (1^^-1^^-1^^-) surface of heat-treated Si-doped GaAs crystal, but these etch figures did not appear on non-doped case. The arrow-shaped etch figure corresponds to a two-dimensional defect which is formed by dislocation clibming. The dislocation clibming mechanism and the formation mechanism of the two-dimensional defect are discussed precisely and a model of the formation is proposed. which concerns with Si-impurities and As interstitials. | |||||||||
内容記述 | ||||||||||
内容記述タイプ | Other | |||||||||
内容記述 | 紀要論文 | |||||||||
出版者 | ||||||||||
言語 | ja | |||||||||
出版者 | 琉球大学工学部 | |||||||||
言語 | ||||||||||
言語 | jpn | |||||||||
資源タイプ | ||||||||||
資源タイプ | departmental bulletin paper | |||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
出版タイプ | ||||||||||
出版タイプ | VoR | |||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
識別子 | ||||||||||
識別子 | http://hdl.handle.net/20.500.12000/12489 | |||||||||
識別子タイプ | HDL | |||||||||
収録物識別子 | ||||||||||
収録物識別子タイプ | ISSN | |||||||||
収録物識別子 | 0389-102X | |||||||||
収録物識別子 | ||||||||||
収録物識別子タイプ | NCID | |||||||||
収録物識別子 | AN0025048X | |||||||||
収録物名 | ||||||||||
言語 | ja | |||||||||
収録物名 | 琉球大学工学部紀要 | |||||||||
書誌情報 |
号 28, p. 47-53, 発行日 1984-10 |